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iH160 Dry Pump

  • iH160Dry Pump
  • iH160 Dry Pump
  • iH160Dry Pump
Price:
Please Contact Us
SKU:
A59010908
Weight:
540.00 LBS


Product Description

iH80 Dry Pump 460V, 60 Hz 3Ø

 

iH Dry Pumps

 

The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors.

 

Features and Benefits

  • Optimized utilities consumption.
  • No preventative maintenance required.
  • Cantilevered shafts and specially profiled rotors for better handling of particles.
  • Reserve motor power also maximizes reliability on harsh-duty CVD applications.
  • Corrosion resistant materials allow pumping of corrosive gases.
  • Higher operating temperatures provide ample margin to prevent gas condensation.
  • The one-piece shaft eliminates the need for a motor coupling and a fifth pumping stage removes the need for a silencer and eliminates particle accumulation, both reducing the overall footprint.
 
 

Technical Data


 

Models iH80iH160iH600iH1000iH1800
Peak Speed 103 m3h-1 165 m3h-1 600 m3h-1 1000 m3h-1 1800 m3h-1
61 cfm 97 cfm 353 cfm 589 cfm 1060 cfm
1717 l min-1 2750 l min-1 10000 l min-1 16670 l min-1 30000 l min-1
Ultimate Vacuum 1 x 10-2 mbar 7 x 10-4 mbar 1 x 10-3 mbar
7.5 x 10-3 Torr 5.3 x 10-4 Torr 7.5 x 10-4 Torr
1 Pa 0.07 Pa 0.1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet Connection ISO63 ISO100
Outlet Connection NW40
Typical cooling water flow
at 15 psi pressure drop
120 l h-1 240 l h-1
2 l min-1 4 l min-1
Weight 240 kg 244 kg 415 kg 430 kg 502 kg
Power input at ultimate 2.7 kW 3.1 kW 3.4 kW 3.8 kW 4.1 kW
Rated motor power 3.5 kW 5.0 kW 6.1 kW 6.1 kW 7.0 kW
Oil Capacity 0.7 l 0.85 l 1.43 l 1.48 l 1.6 l

  

Overview

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. 
  
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Technology

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated. 
  
The iH80 system has an HCDP80 dry pump; The HCDP pump has enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable. 
  
The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system. 
  
You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.

Applications

  • Load Lock
  • Transfer
  • Metrology
  • Lithography
  • PVD Process
  • PVD Pre-clean
  • RTA
  • Strip/Ashing
  • Etching
  • Implant Source
  • HDP CVD
  • RTP
  • SACVD
  • MCVD
  • PECVD
  • LPCVD
  • ALD
All figures are typical without gas ballast.
 
 
ORDERING INFORMATION

 

  200/208 V 230 V 380/415 V 460 V
  50/60 Hz 60 Hz 50 Hz 60 Hz
iH80 A59000945 A59000957 A59000946 A59000908
iH160 A59010945 A59010957 A59010946 A59010908
iH600 A59020945 A59020957 A59020946 A59020908
iH1000 A59030945  A59030957 A59030946 A59030908
 
 

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