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Turbo Pumps

Vacuum Pump Supply also has rebuilding services for Turbo Pumps

Inlet
Flange
Pumping Speed
L/sec (cfm)
Ult. Pressure
Torr (mBar)
BOC Edwards
EXT 70
Turbo
KF50
N2: 60 (110)
He: 56 (119)
H2: 48 (102)
3.7 x 10-9
(5 x 10-9)
Adixen
ATP 80
Turbo
ISO63-K
or 4-1/2"CF
N2: 80 (170)
He: 50 (106)
H2: 40 (85)
3.7 x 10-9
(5 x 10-9)
Adixen
ATP 100
Turbo
ISO100-K
or 6"CF
N2: 100 (212)
He: 60 (127)
H2: 40 (85)
3.7 x 10-9
(5 x 10-9)
Adixen
ATP 150
Turbo
ISO100-K
or 6"CF
N2: 140 (297)
He: 100 (212)
H2: 80 (170)
3.8 x 10-10
(5 x 10-10)
Leybold
TMP50
Turbo
KF40
N2: 33 (70)
He: 36 (76)
H2: 28 (59)
1 x 10-9
(1.3 x 10-9)
Leybold
TMP50
Turbo
ISO63-K
or 4-1/2"CF
N2: 55 (117)
He: 48 (102)
H2: 30 (64)
1 x 10-9
(1.3 x 10-9)
BOC Edwards
EXT 70
Turbo
KF40
N2: 52 (110)
He: 53 (123)
H2: 46 (97)
3.7 x 10-9
(5 x 10-9)
Leybold
TMP151C
Turbo
ISO100-K
or 6"CF
N2: 145 (307)
He: 135 (286)
H2: 115 (244)
7.5 x 10-11
(1 x 10-10)
Leybold
TMP361C
Turbo
ISO160-K
N2: 400 (848)
He: 380 (805)
H2: 370 (784)
7.5 x 10-11
(1 x 10-10)
Leybold
TMP1100C
Turbo
ISO250-K
N2: 1,050 (2,225)
He: 850 (1,801)
H2: 630 (1,335)
2.2 x 10-10
(3 x 10-10)
Pfeiffer
TPH/U 1201/1201C
Turbo
ISO200-K
or 10"CF
N2: 1,250 (2,649)
He: 1,300 (2,755)
H2: 1,100 (2,331)
< 3.5 x 10-10
(< 5 x 10-10)
Pfeiffer
TPH/U 1501/1501C
Turbo
ISO250-K
or 12"CF
N2: 1,450 (3,072)
He: 1,350 (2,860)
H2: 1,150 (2,437)
< 3.5 x 10-10
(< 5 x 10-10)
Pfeiffer
TPH/U 1801/1801C
Turbo
ISO200-K
N2: 1,450 (3,072)
He: 1,650 (3,496)
H2: 1,700 (3,602)
< 7.5 x 10-8
(< 1 x 10-7)
Pfeiffer
TPH/U 2301
Turbo
ISO250-K
or 12"CF
N2: 1,900 (4,026)
He: 2,050 (4,344)
H2: 1,850 (3,920)
< 3.5 x 10-10
(< 5 x 10-10)
Adixen
ATP 400
Turbo
ISO160-K
or 8"CF
N2: 400 (848)
He: 300 (636)
H2: 250 (530)
6 x 10-10
(8 x 10-10)
Adixen
ATP 900
Turbo
ISO200-K
or 10"CF
N2: 900 (1,907)
He: 540 (1,144)
H2: 300 (636)
3.8 x 10-10
(5 x 10-10)
Leybold
TMP151
Turbo
ISO100-K
or 6"CF
N2: 145 (307)
He: 135 (286)
H2: 115 (244)
1 x 10-10
(1.3 x 10-10)
Leybold
TMP361
Turbo
ISO100-K
or 6"CF
N2: 345 (731)
He: 340 (720)
H2: 340 (720)
7.5 x 10-11
(1 x 10-10)
Leybold
TMP361
Turbo
ISO160-K
or 8"CF
N2: 400 (848)
He: 380 (805)
H2: 370 (784)
7.5 x 10-11
(1 x 10-10)
Leybold
TMP361C
Turbo
ISO100-K
N2: 345 (731)
He: 340 (720)
H2: 340 (720)
7.5 x 10-11
(1 x 10-10)
Leybold
TMP1000C
Turbo
10"CF
N2: 1,100 (2,331)
He: 975 (2,065)
H2: 970 (2,055)
1 x 10-10
(1.3 x 10-10)
BOC Edwards
EXT 70
Turbo
ISO63-K
N2: 65 (110)
He: 60 (127)
H2: 50 (106)
3.7 x 10-9
(5 x 10-9)
Adixen
ATP 100C
Turbo
ISO100-K
or 6"CF
N2: 100 (212)
He: 60 (127)
H2: 40 (85)
3.7 x 10-9
(5 x 10-9)
BOC Edwards
EXT 70
Turbo
4-1/2"CF
N2: 65 (110)
He: 60 (127)
H2: 50 (106)
3.7 x 10-10
(5 x 10-10)
Adixen
ATP 150C
Turbo
ISO100-K
or 6"CF
N2: 140 (297)
He: 100 (212)
H2: 80 (170)
3.8 x 10-10
(5 x 10-10)
Adixen
ATP 400C
Turbo
ISO160-K
or 8"CF
N2: 400 (848)
He: 300 (636)
H2: 250 (530)
6 x 10-10
(8 x 10-10)
Adixen
ATP 900C
Turbo
ISO200-K
or 10"CF
N2: 900 (1,907)
He: 540 (1,144)
H2: 300 (636)
3.8 x 10-10
(5 x 10-10)
Adixen
ATP 80C
Turbo
ISO63-K
or 4-1/2"CF
N2: 80 (170)
He: 50 (106)
H2: 40 (85)
3.7 x 10-9
(5 x 10-9)
BOC Edwards
ED-NRY0FC000
Turbo Pump
Package
ISO63-K
Turbo, N2: 65 (138)
(n/a)
BOC Edwards
ED-NRY0FD000
Turbo Pump
Package
ISO63-K
Turbo, N2: 65 (138)
(n/a)
BOC Edwards
ED-NGAD47000
Turbo Pump
Package
4-1/2" CF
Turbo, N2: 65 (138)
(n/a)
Pfeiffer
PMS0507000
Turbo Pump
Package
ISO63-K
Turbo, N2: 59 (125)
(n/a)
Pfeiffer
PMS0607000
Turbo Pump
Package
4-1/2" CF
Turbo, N2: 59 (125)
(n/a)
Pfeiffer
PMS0711000
Turbo Pump
Package
ISO100-K
Turbo, N2: 210 (445)
(n/a)
BOC Edwards
ED-NRY0FG000
Turbo Pump
Package
ISO100-K
Turbo, N2: 220 (466)
(n/a)
BOC Edwards
ED-NGX850000
Turbo Pump
Package
6" CF
Turbo, N2: 220 (466)
(n/a)
Pfeiffer
PMS03525
Turbo Pump
Package
ISO63-K
Turbo, N2: 60 (127)
(n/a)
Pfeiffer
PMS0811000
Turbo Pump
Package
6" CF
Turbo, N2: 210 (445)
(n/a)
Pfeiffer
PMS1113000
Turbo Pump
Package
ISO160-K
Turbo, N2: 510 (1,081)
(n/a)
Pfeiffer
PMS1213000
Turbo Pump
Package
8" CF
Turbo, N2: 510 (1,081)
(n/a)
BOC Edwards
ED-NRY0FE000
Turbo Pump
Package
4-1/2" CF
Turbo, N2: 65 (138)
(n/a)
BOC Edwards
ED-NRY0FF000
Turbo Pump
Package
ISO100-K
Turbo, N2: 220 (466)
(n/a)
BOC Edwards
ED-NRY0FH000
Turbo Pump
Package
6" CF
Turbo, N2: 220 (466)
(n/a)
Pfeiffer
PMS03526
Turbo Pump
Package
4-1/2" CF
Turbo, N2: 60 (127)
(n/a)
Pfeiffer
PMS0501000
Turbo Pump
Package
ISO63-K
Turbo, N2: 59 (125)
(n/a)
Pfeiffer
PMS0601000
Turbo Pump
Package
4-1/2" CF
Turbo, N2: 59 (125)
(n/a)
Pfeiffer
PMS0703000
Turbo Pump
Package
ISO100-K
Turbo, N2: 210 (445)
(n/a)
Pfeiffer
PMS0803000
Turbo Pump
Package
6" CF
Turbo, N2: 210 (445)
(n/a)
Pfeiffer
PMS1105000
Turbo Pump
Package
ISO160-K
Turbo, N2: 510 (1,081)
(n/a)
Pfeiffer
PMS1205000
Turbo Pump
Package
8" CF
Turbo, N2: 510 (1,081)
(n/a)
Adixen
ATH 31C
Turbo-Drag
Hybrid
ISO63-K
or 4-1/2"CF
N2: 30 (64)
He: 20 (42)
H2: 14 (30)
3.8 x 10-10
(5 x 10-10)
Adixen
ATH 31+
Turbo-Drag
Hybrid
ISO63-K
or 4-1/2"CF
N2: 30 (64)
He: 20 (42)
H2: 14 (30)
3.8 x 10-10
(5 x 10-10)
Adixen
ATH 31
Turbo-Drag
Hybrid
ISO63-K
or 4-1/2"CF
N2: 30 (64)
He: 14 (30)
H2: 6 (13)
7.5 x 10-9
(1 x 10-8)
Adixen
ATH 200/200(I)
Turbo-Drag
Hybrid
ISO100-K
or 6"CF
N2: 200 (424)
He: 130 (275)
3.8 x 10-10
(5 x 10-10)
Adixen
ATH 300/300(CI)
Turbo-Drag
Hybrid
ISO100-K
or 6"CF
N2: 250 (530)
He: 215 (456)
3.8 x 10-10
(5 x 10-10)
BOC Edwards
EXT 70H
Turbo-Drag
Hybrid
KF40
N2: 52 (110)
He: 53 (112)
H2: 46 (97)
5 x 10-10
(6.6 x 10-10)
BOC Edwards
EXT 70H
Turbo-Drag
Hybrid
ISO63-K
or 4-1/2"CF
N2: 65 (138)
He: 60 (127)
H2: 50 (106)
5 x 10-10
(6.6 x 10-10)
BOC Edwards
EXT 255H
Turbo-Drag
Hybrid
ISO100-K
or 6"CF
N2: 220 (466)
He: 230 (487)
H2: 180 (381)
< 5 x 10-10
(6.7 x 10-10)
Pfeiffer
TPD011
Turbo-Drag
Hybrid
KF25
N2: 10 (21.2)
He: 6 (12.7)
H2: 3.7 (7.8)
< 3.75 x 10-5
(< 5 x 10-5)
Shimadzu
203LM/LMC
Turbo-Drag
Hybrid
ISO100-K
or 6"CF
N2: 190 (403)
He: 140 (297)
H2: 120 (254)
1 x 10-10
(1.3 x 10-10)
Shimadzu
303LM/LMC
Turbo-Drag
Hybrid
ISO100-K
or 6"CF
N2: 320 (678)
He: 340 (720)
H2: 320 (678)
1 x 10-10
(1.3 x 10-10)
BOC Edwards
EXT 555H
Turbo-Drag
Hybrid
ISO160-K
or 8"CF
N2: 540 (1,144)
He: 580 (1,229)
H2: 500 (1,059)
7.5 x 10-11
(1 x 10-10)
Leybold
TW 70H
Turbo-Drag
Hybrid
ISO63-K
or 4-1/2"CF
N2: 60 (110)
He: 52 (110)
H2: 40 (85)
1.5 x 10-10
(2 x 10-10)
Leybold
TW 300H
Turbo-Drag
Hybrid
ISO100-K
or 6"CF
N2: 240 (509)
He: 240 (509)
H2: 160 (297)
7.5 x 10-11
(1 x 10-10)
Leybold
TW 300
Turbo-Drag
Hybrid
ISO100-K
or 6"CF
N2: 240 (509)
He: 230 (487)
H2: 140 (297)
1.5 x 10-10
(2 x 10-10)
Leybold
TW 701
Turbo-Drag
Hybrid
ISO160-K
or 8"CF
N2: 680 (1,440)
He: 330 (699)
H2: 530 (1,123)
1.1 x 10-10
(1.5 x 10-10)
Pfeiffer
TMH/U 71
Turbo-Drag
Hybrid
KF40
N2: 33 (70)
He: 39 (83)
H2: 32 (68)
< 7.5 x 10-8
(< 1 x 10-7)
Pfeiffer
TMH/U 71
Turbo-Drag
Hybrid
ISO63-K
4-1/2"CF
N2: 59 (125)
He: 50 (106)
H2: 42 (89)
< 3.5 x 10-10
(< 5 x 10-10)
Pfeiffer
TMH/U 262
Turbo-Drag
Hybrid
ISO100-K
6"CF
N2: 220 (466)
He: 220 (466)
H2: 175 (371)
< 3.5 x 10-10
(< 5 x 10-10)
Pfeiffer
TMH/U 262 C
Turbo-Drag
Hybrid
ISO63-K
4-1/2"CF
N2: 175 (371)
He: 92 (195)
H2: 156 (331)
7 x 10-9
( 1 x 10-8)
Pfeiffer
TMH/U 521
Turbo-Drag
Hybrid
ISO100-K
6"CF
N2: 270 (572)
He: 360 (763)
H2: 350 (742)
< 3.5 x 10-10
(< 5 x 10-10)
Pfeiffer
TMH/U 521
Turbo-Drag
Hybrid
ISO160-K
8"CF
N2: 510 (1,081)
He: 520 (1,102)
H2: 450 (953)
< 3.5 x 10-10
(< 5 x 10-10)
Pfeiffer
TMH/U 521 C
Turbo-Drag
Hybrid
ISO100-K
6"CF
N2: 260 (551)
He: 296 (627)
H2: 220 (466)
7.5 x 10-9
( 1 x 10-8)
Pfeiffer
TMH/U 521 C
Turbo-Drag
Hybrid
ISO160-K
8"CF
N2: 430 (911)
He: 380 (805)
H2: 300 (636)
7.5 x 10-9
( 1 x 10-8)
Shimadzu
403LM/LMC
Turbo-Drag
Hybrid
ISO160-K
or 8"CF
N2: 420 (890)
He: 360 (763)
H2: 340 (720)
1 x 10-10
(1.3 x 10-10)
Shimadzu
803LM/LMC
Turbo-Drag
Hybrid
ISO160-K
or 8"CF
N2: 800 (1,695)
He: 800 (1,695)
H2: 700 (1,483)
1 x 10-11
(1.3 x 10-11)
Shimadzu
1003LM/LMC
Turbo-Drag
Hybrid
ISO200-F
or 10"CF
N2: 1,080 (2,288)
He: 930 (1,971)
H2: 790 (1,674)
1 x 10-11
(1.3 x 10-11)
Shimadzu
2003LM/LMC
Turbo-Drag
Hybrid
ISO250-F
or 12"CF
N2: 2,000 (4,238)
He: 1,800 (3,814)
H2: 1,600 (3,390)
1 x 10-11
(1.3 x 10-11)
Shimadzu
3203LM/LMC
Turbo-Drag
Hybrid
ISO320-F
N2: 3,200 (6,780)
He: 3,000 (6,357)
H2: 2,400 (5,085)
1 x 10-9
(1.3 x 10-9)
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