Find Safety Data Sheets (SDS), vacuum pump oil recommendations, OEM oils, and OEM-equivalent replacement lubricants for Edwards, Precision Plus, Busch, Leybold, Stokes, Kinney, Welch, Pfeiffer, Alcatel / Adixen, Rietschle, and other vacuum pump manufacturers.
Use this resource to locate safety information for current vacuum pump oils, legacy lubricants, synthetic oils, PFPE fluids, diffusion pump fluids, and flushing fluids.
Need help selecting the correct vacuum pump oil?
Call Vacuum Pump Supply at 866-640-3523
with your pump manufacturer and model number.
Important: Oil viscosity alone does not determine compatibility. Always verify the pump model, lubricant type, process conditions, operating temperature, and chemical compatibility before changing vacuum pump oil.
For many standard oil-sealed rotary vane vacuum pump applications, the VPS M-Series provides mineral vacuum pump oil options in three commonly used viscosity ranges.
ISO VG 32 mineral vacuum pump oil for lower-viscosity applications, smaller pumps, and colder starts.
Shop M32ISO VG 68 general-purpose mineral vacuum pump oil for many rotary vane vacuum pump applications.
Shop M68ISO VG 100 mineral vacuum pump oil for pumps requiring greater viscosity and sealing support.
Shop M100View Vacuum Pump Oil Cross Reference Shop All Vacuum Pump Oil
Edwards Ultragrade oils are formulated for oil-sealed vacuum pumps and related vacuum applications. Ultragrade 15, 19, 20, and 70 are covered by the Edwards Ultragrade Safety Data Sheet.
| Edwards Oil | Typical Application | Buy Oil | Safety Data Sheet |
|---|---|---|---|
| Edwards Ultragrade 15 | Small oil-sealed rotary vane vacuum pumps | Shop Edwards Oil | View SDS |
| Edwards Ultragrade 19 | Edwards RV, E2M, and other compatible two-stage rotary vane pumps | Buy UG19 Equivalent | View SDS |
| Edwards Ultragrade 20 | Larger Edwards rotary vane pumps and compatible vacuum equipment | Buy Plus 20 | View SDS |
| Edwards Ultragrade 70 | Higher-viscosity Edwards vacuum applications | Shop Edwards Oil | View SDS |
Precision Plus supplies mineral, synthetic, flushing, diffusion pump, and specialty vacuum fluids. Vacuum Pump Supply carries many of these fluids and compatible replacement oils.
| Oil / Fluid | Type / Cross Reference | Buy Oil | Safety Data Sheet |
|---|---|---|---|
| VPL M32 |
ISO VG 32 mineral oil Replaces Precision Plus Plus 100 Cross-reference: Busch VM 032 |
Buy M32 | View SDS |
| VPL M68 |
ISO VG 68 mineral oil Replaces Plus 19, Plus 21, Plus DUO Cross-reference: Leybold LVO130 / LVO150 |
Buy M68 | View SDS |
| VPL M100 |
ISO VG 100 mineral oil Cross-reference: Leybold LVO100, Busch R-530, Kinney KV-100 |
Buy M100 | View SDS |
| VPL S32 | ISO VG 32 PAO synthetic vacuum pump oil | Shop Synthetic Oil | View SDS |
| VPL S68 | ISO VG 68 PAO synthetic vacuum pump oil | Shop Synthetic Oil | View SDS |
| VPL S100 | ISO VG 100 PAO synthetic vacuum pump oil | Buy S100 | View SDS |
| D704 | Silicone diffusion pump fluid | Shop Vacuum Fluids | View SDS |
| VP FF | Vacuum pump flushing fluid | Shop Flushing Fluid | View SDS |
Older vacuum pumps, manuals, and maintenance records may reference discontinued Precision Plus oil names. These Safety Data Sheets remain useful for identifying legacy lubricants and replacement directions.
| Legacy Oil | Replacement / Oil Resource | Safety Data Sheet |
|---|---|---|
| Plus 19 | Shop M68 Replacement | View SDS |
| Plus 20 | Buy Plus 20 | View SDS |
| Plus 21 | Shop M68 Replacement | View SDS |
| Plus 100 | Shop M32 Replacement | View SDS |
| Plus 530 | Shop M100 Replacement | View SDS |
| Plus 570 | Shop S100 Replacement | View SDS |
| Plus 580 | Shop Synthetic Oil | View SDS |
| Plus 590 | Shop S100 Replacement | View SDS |
| Plus DUO | Shop M68 Replacement | View SDS |
| Plus UG19 | Buy Plus UG19 | View SDS |
| Plus UG20 | Shop Vacuum Oil | View SDS |
| Plus UG70 | Shop Mineral Oil | View SDS |
Busch vacuum pumps use mineral, synthetic, food-grade, and PFPE lubricant families. Older Busch R5 pumps may also reference legacy oil names such as R-530 and R-590.
| Busch Oil | Type / Application | Buy Oil / Replacement | SDS / Documents |
|---|---|---|---|
| Busch VM 032 | ISO VG 32 mineral vacuum pump oil | Buy M32 Equivalent | Busch SDS / Documents |
| Busch R-530 | Legacy ISO VG 100 mineral oil reference | Buy M100 Equivalent | Busch SDS / Documents |
| Busch VM 068 | ISO VG 68 mineral vacuum pump oil | Buy M68 | Busch SDS / Documents |
| Busch VM 100 | ISO VG 100 mineral vacuum pump oil | Buy M100 | Busch SDS / Documents |
| Busch Synthetic / Food Grade | VSA, VSB, VSL, VSC and VSI families | Shop Vacuum Oils | Busch SDS / Documents |
| Busch PFPE | Specialty chemically resistant operating fluids | Shop PFPE Fluids | Busch SDS / Documents |
| Leybold Oil | Typical Application | Buy Oil | SDS / Documents |
|---|---|---|---|
| LEYBONOL LVO 100 | Mineral vacuum pump oil | Buy M100 Replacement | View Documents |
| LEYBONOL LVO 120 | Standard oil for many smaller SOGEVAC applications | Buy OEM LVO 120 | View SDS / Documents |
| LEYBONOL LVO 130 | Mineral oil for many larger SOGEVAC applications | Buy M68 Equivalent | View Documents |
| LEYBONOL LVO 140 | Food-industry mineral vacuum pump oil | Buy OEM LVO 140 | View Documents |
| LEYBONOL Specialty / PFPE | Synthetic, ester and chemically resistant fluids | Shop LEYBONOL Oils | View Documents |
Stokes Microvac rotary piston pumps and Stokes mechanical boosters use application-specific V-Lube lubricants. Confirm the exact pump model and operating conditions before substituting oil.
| Stokes Oil | Typical Application | Buy Oil | SDS / Documents |
|---|---|---|---|
| Stokes V-Lube F | Stokes Microvac rotary piston pumps including many 212 and 412 applications | Shop Stokes Oil | Search SDS |
| Stokes V-Lube G | Stokes vacuum equipment requiring V-Lube G | Shop Stokes Oil | View Documents |
| Stokes V-Lube H | Stokes mechanical boosters and blower applications | Shop Stokes Oil | Search SDS |
| Kinney Oil | Typical Application | Buy Oil / Equivalent | SDS |
|---|---|---|---|
| Kinney KV100 | Oil-sealed mechanical vacuum pumps | Shop ISO 100 Oil | View Official SDS |
| Kinney AX Oil | Low-vapor-pressure mechanical vacuum applications | Shop Vacuum Oil | View Official SDS |
| KINLUBE / Specialty Oils | Kinney pump and booster applications | Shop Vacuum Oil | Kinney SDS Library |
| Welch Oil | Typical Application | Buy Oil / Equivalent | SDS |
|---|---|---|---|
| Welch Premium Vacuum Pump Oil | Welch DuoSeal and compatible oil-sealed vacuum pumps | Buy UG19 Equivalent | View Official SDS |
| Oil / Equipment | Typical Application | Buy Oil / Equivalent | SDS / Documents |
|---|---|---|---|
| Pfeiffer P3 | Mineral operating fluid for compatible rotary vane pumps | Shop Vacuum Oil | View Documents |
| Pfeiffer A300 | Mineral vacuum pump operating fluid | Shop Vacuum Oil | View Documents |
| Alcatel / Adixen Pascal Oils | Legacy Pascal-series rotary vane vacuum pumps | Find Replacement Oil | Manufacturer Documents |
Rietschle oil-lubricated rotary vane vacuum pumps require the correct lubricant viscosity and formulation for lubrication, sealing, cooling, and vacuum performance.
| Oil / Application | Buy Oil | SDS / Assistance |
|---|---|---|
|
Rietschle V-VC Series Oil Oil-lubricated rotary vane vacuum pumps |
Shop Rietschle Oil | Call 866-640-3523 with the exact pump model for the recommended oil and current SDS. |
PFPE and specialty vacuum fluids are used in chemically aggressive, oxygen-rich, semiconductor, high-vacuum, and other specialized vacuum applications.
Important: Never replace PFPE fluid with conventional hydrocarbon vacuum oil, or conventional oil with PFPE, without confirming compatibility and following the appropriate pump cleaning and conversion procedure.
| Fluid Family | Examples | Shop | SDS |
|---|---|---|---|
| Fomblin | 30GX, Y LVAC 06/6, Y LVAC 14/6, Y LVAC 25/6, UT18 | Shop PFPE Fluids | View SDS |
| Krytox | PFPE NRT 8805, VPF 1514, VPF 1525, 240AD, GPL 224, VPF 1506 | Shop Specialty Fluids | View SDS |
| Drynert | Drynert 25/6 | Shop Specialty Fluids | View SDS |
Not sure whether an OEM oil has been replaced, renamed, or superseded? Use the Vacuum Pump Supply Oil Cross Reference Chart to compare common Edwards, Leybold, Busch, Welch, Stokes, and other vacuum pump oils.
View Vacuum Pump Oil Cross Reference
Send us the information you have and Vacuum Pump Supply can help identify the correct lubricant or replacement.
We support Edwards, Busch, Leybold, Stokes, Kinney, Welch, Pfeiffer, Alcatel / Adixen, Rietschle, Becker, and other industrial and laboratory vacuum pumps.
Vacuum Pump Supply LLC
Vacuum Pump Parts, Repair Kits, Filters & Oils
866-640-3523
Safety Data Sheets are provided for reference and safety information. Always review the current manufacturer's SDS before handling a lubricant, chemical, or specialty vacuum fluid. Product formulations, regulatory classifications, and Safety Data Sheets may change over time.