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  • Rotary Vane Pumps Repair Kits and Parts
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  • Vacuum Oil and Fluids
  • Filters, Traps, Mist Eliminators
  • NEW Rotary Vane Pumps
  • Dry Compressing Vacuum Pumps
  • Blower/Booster Repair kits
  • Semiconductor Dry Pump Repair Kits and Parts
  • Vacuum Blowers/Boosters New Pumps
  • Turbo Pumps and Parts
  • Semiconductor Dry Vacuum Pumps
  • Screw Pumps and Parts
  • Diaphragm Lab Pumps
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  • Oil-sealed rotary screw vacuum pumps

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    • Vacuum Oil and Fluids

    Vacuum Pump Oil, Fluids & Lubricants

    Shop vacuum pump oil, synthetic fluids, flushing fluid, PFPE fluids, diffusion pump fluids, and OEM-equivalent replacement oils.

    The right vacuum pump oil helps protect vanes, seals, bearings, and internal pump components while improving pump performance and service life. Vacuum Pump Supply offers mineral vacuum pump oil, synthetic vacuum pump oil, flushing fluid, diffusion pump fluids, and specialty lubricants for many major vacuum pump brands.

    Use this page to quickly find oil by type, application, or OEM cross-reference.

    Maintenance tip:
    Always replace vacuum pump oil after a rebuild, after contamination, or when oil appears dark, milky, dirty, or degraded. Fresh oil is one of the easiest ways to protect your pump investment.
    Need an OEM equivalent?
    We can help match vacuum pump oil for Leybold, Edwards, Busch, Becker, Welch, Alcatel / Adixen / Pfeiffer, Rietschle, and other major brands.
    Mineral Oil Synthetic Oil Flushing Fluid PFPE / Specialty Diffusion Pump Fluids Oil Cross Reference

    Mineral Vacuum Pump Oil

    General-purpose vacuum pump oil for many rotary vane and oil-sealed vacuum pumps.

    M32 Vacuum Pump Oil M68 Vacuum Pump Oil M100 Vacuum Pump Oil

    Synthetic Vacuum Pump Oil

    Synthetic fluids for applications requiring improved thermal stability, longer service life, or higher performance than standard mineral oil.

    S100 Synthetic Vacuum Pump Oil Synthetic Vacuum Pump Oils

    Vacuum Pump Flushing Fluid

    Use flushing fluid during maintenance to help remove degraded oil, residue, and contamination before refilling with fresh vacuum pump oil.

    Vacuum Pump Flushing Fluid FF-005 Flushing Fluid

    PFPE & Specialty Vacuum Fluids

    Specialty fluids for chemically demanding or oxygen-service applications where standard mineral or synthetic oils are not suitable.

    Fomblin Y14/6 Fomblin Y25/6 Fomblin Y06/6

    Diffusion Pump Fluids

    Diffusion pump fluids for high-vacuum systems, lab equipment, coating systems, and other diffusion pump applications.

    D704 Diffusion Pump Fluid D705 Diffusion Pump Fluid All Diffusion Pump Fluids

    Vacuum Pump Oil Cross Reference

    Find OEM-equivalent vacuum pump oil replacements by brand, oil family, or viscosity.

    Leybold Leybonol Oil Cross Reference Vacuum Pump Oil Cross Reference Chart Shop All Vacuum Oil & Fluids

    Choosing the Right Vacuum Pump Oil

    Oil Type Best For Notes
    Mineral Oil General rotary vane pump service Most common choice
    Synthetic Oil Higher heat, longer service, demanding use Better stability
    PFPE Fluid Chemical / oxygen-compatible applications Specialty use only
    Diffusion Pump Fluid High-vacuum diffusion pumps Not for rotary vane pumps
    Flushing Fluid Cleaning during oil changes or rebuilds Use before fresh oil
    Not sure which oil you need?
    Send us your pump model number or the OEM oil name and we will help match the correct replacement.
    Get Help Choosing Oil

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